We have developed coating preparation processes and equipment suitable for actual production, and has core technologies for the production of CVD SiC coatings, TaC coatings and ceramic matrix composite materials. The company provides MOCVD equipment, monocrystalline silicon furnaces, PECVD furnaces, monocrystalline SiC furnaces, monocrystalline CaN furnaces and third-generation semiconductor epitaxial furnaces, oxidation furnaces, ion implanters, engraving machines for LED, photovoltaic, semiconductor, metallurgy, electronics and other industries. The corrosion machine provides temperature-resistant, corrosion-resistant, high-purity parts/consumables, and provides high-temperature and high-purity material/parts solutions for users’ product quality optimization and equipment transformation.

Application:

MOCVD

                                                    4 or 6 inch Graphite Plate with CVD SIC  

                                                    4 or 6 inch Graphite Plate with CVD SIC    

                                                                          SIC Plate with CVD TaC        

                                                                                      SIC Ring

                                                                     SIC Crucible with CVD TaC                                       

                                                                                          SIC Plate