Ultra-smooth complex surfaces

Freeform Lens

Free-form surface with variable curvature, diameter 160mmx60mm, within the effective diameter

Luphoscan detection accuracy reaches PV=0.261 λ, PV99=0.198

λ, RMS=0.039λ, roughness Rq=0.4nm, smoothness better than 10/5λ;

High-order Aspheric Cylinder

Caliber 250mmx120mm high-order aspheric cylinder, three-coordinate detection reaches

PV<1λ, RMS<1/10λ, roughness Rq=0.4nm;

Off-Axis Aspheric Surface

Caliber 320mmx110mm off-axis paraboloid, Luphoscan inspection within the effective diameter,The measurement accuracy reaches PV=0.169 λ, RMS=0.016λ; the interferometer self-collimation detection reaches PV=0.21 λ, RMS=0.016 λ, the roughness Rq=0.31nm, and the smoothness is better than 10/5;

Special-Shaped Coaxial Aspheric Surface

Diameter Φ200mm, coaxial special-shaped hyperboloid, R=-343mm, Luphoscan detection

PV=0.141λ, PV99=0.067λ, RMS=0.009λ, roughness reaches Rq=0.32nm;

Rectangular Coaxial Aspheric Surface

Rectangular coaxial ellipsoid surface, diameter

200mmx110mm, R=280mm, Luphoscan detection accuracy within effective aperture

PV=0.145λ, PV99=0.091λ, RMS=0.016 λ Roughness reaches Rq=0.35nm;

Circular coaxial aspheric surface

Diameter Φ220mm coaxial paraboloid, R=-311mm, Luphoscan detection accuracy is PV=0.118λ, PV99=0.086λ, RMS=0.017λ, roughness reaches Rq=0.33nm;