Ultra Precise Polishing Technology

Fabrication Equipment

Ultra Precise Milling Machine

Brand:OPTOTECH

Model:MCG250

Capbility:

--With Φ50-Φ600mm aspherical

Milling and grinding of surfaces, cylinders, free-form surfaces, etc.

ability;

--The maximum surface shape after milling and grinding can reach

PV<2um, roughness up to Rq<0.1um,

Damage layer<10um;

Precision Engraving Machine

Brand:OPTOTECH

Model:MCG250

Capbility:

It has the ability to mill and grind various surfaces such as Φ600mm aspherical surfaces, cylindrical surfaces, and free-form surfaces;

❖ Capable of rapid prototyping of complex shapes, such as lightweight mirrors;

❖ It has the functions of deformation-free cutting and drilling;

Efficient processing of airbags

Brand:OPTOTECH

Model:MCG-251

Capbility:

With Φ50-Φ600mm aspherical

Processing capabilities for surfaces, cylinders, free-form surfaces, etc.

force;

Aspheric surface polishing can be completed quickly

Brightening, damage removal, surface smoothing, and adding

Machining to surface shape accuracy PV<1/5 λ,

Rq<0.5nm, edge effect width<5mm;

Cold processing equipment

Single-axis machine, ring polishing machine, double-sided polishing machine

Capbility:

With more than 50 single-axis machining

work station, 10 cylindrical processing stations,

6 large-diameter ring polishing machines, 3 double-sided

High-speed polishing machine;

❖ Annual output of large-diameter planes and crystals

Window production capacity of more than 300 pieces;

❖ Processing accuracy PV<1/10λ, rough

Degree<0.4nm, smoothness 10/5;

Small grinding head processing

Model:CCOS-600

Capbility:

Small grinding head smooth processing can also be used

Special process solution to remove the surface evenly

Surface scratches and pits, greatly improved

surface finish;

❖ Detailed analysis and experimental study of smooth

Factors affecting the degree of smoothness at 10/5

degree plays an important role in aspheric surface processing

effect;

Magnetorheological processing

Model:MRF-600

Capbility:

Magnetorheological fluid is an efficient, high-precision

Non destructive processing method;

The highest machining accuracy reaches PV=±

20nm, or RMS=5nm, with a roughness of up to

To Rq=0.3nm;

Ion beam Polishing

Model:NTG-500

Capbility:

Ion beam is a non-contact ultra-high precision

degree processing device that can realize atomic

level of material removal;

❖ Introduced German NTG-700 ion beam laser

machining device, processing diameter 700mm, can

To achieve PV<20nm, RMS<5nm,

Roughness Rq is better than 0.5nm;

Testing Instrument

Three coordinate detection

Brand:LEITZ

Model:Reference

Capbility:

High-precision German Leitz three-dimensional coordinate system, measuring

The volume range reaches 700mmx700mm

x500mm, measurement accuracy reaches

0.7+L/400um;

❖ With the help of self-developed aspheric surface measurement data

According to the fitting software, 200-300mm is typical

Surface accuracy of aspherical and cylindrical surfaces and

The deviation of the interferometer measurement results is less than

0.5um;

Luphoscan aspheric surface detection

Brand:Luphoscan

Model:420-HD

Capbility:

❖ Non-contact measurement, can measure flat

Surface, spherical surface, aspheric surface, off-axis aspheric surface

surfaces, as well as slowly changing cylinders, non-

Spherical and cylindrical surfaces, free-form surfaces, etc.;

❖ Maximum measuring diameter Φ420mm, measuring

The accuracy reaches ± 50nm, which meets the

PV=1/5λ or RMS=1/50λ

regulatory requirements;

Large diameter plane inspection

large aperture interferometer

Capbility:

❖ With Zygo 300, 450mm large mouth

1 MST interferometer each, made in China

1 set each of 450mm and 600mm interferometers;

❖ Achievable 450mm plane PVr 1/25

λ measurement accuracy;

❖ Can be used with CGH to perform large-diameter cylinder

Measurement;

Spherical interferometer

Brand:Zygo 

Model:interferometer

❖ Equipped with 3 Zygo high-precision spherical dryers

interferometer and 3 dynamic interferometers;

❖ Can realize spherical surface measurement with PVr<1/20λ

Quantitative accuracy;

❖ Dynamic interferometry has ultra-long optical path,

Anti-interference ability, detection accuracy

PV<1/10λ;

Roughness and defect measurement

White light interferometer, atomic force microscope

❖ Zygo650 white light interferometer, German cloth

Rucker white light interferometer, atomic force microscope

Mirror, can measure all mid-frequency and high-frequency areas

Roughness of the domain;

❖ Use strong light flashlight to manually detect and whiten

Optical interferometer measures surface defects (scratching

marks, pitting, etc.), quantitatively evaluate the surface

smoothness;